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Probe card

Probe Card

Probe card

Probe Card


Proven by Numbers


The World’s First, Only, and Best

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iEPT

Through its proprietary NEMS technology, NanoX successfully commercialized the world’s first multi-contact probe card featuring fully vertical pins formed on an elastic substrate.

Ultra-Fine Fabrication 

Through NanoX’s proprietary NEMS technology, grooves are formed on the elastic layer and pins are simultaneously grown for precise pin formation, enabling exceptional pin height uniformity and alignment accuracy.

Elastic Layer

Using NanoX’s proprietary formulation, an elastic structure composed of dozens of layers with thicknesses of only a few micrometers (μm) is uniquely implemented, enabling individual pin actuation and overdrive despite the fully vertical pin structure.

Surface Treatment 

NanoX minimizes particles released from the probe card surface through its proprietary surface treatment technology, ensuring high inspection stability by preventing contamination when devices under test come into contact with the probe card.

Electrode Formation

Through its proprietary electrode formation technology, NanoX prevents buckling and short circuits even on resin-based elastic layers, enabling multi-channel implementation while providing high scalability to connect thousands of individual channel electrodes to external equipment.

To address increasingly miniaturized ultra-fine devices, ultra-precision inspection technology is required to achieve pin sizes and pin pitches smaller than the devices themselves.

Leveraging its proprietary technology, NanoX delivers industry-leading pin pitch while maintaining precise pin size, enabling the most advanced probe card available today.

By utilizing fully vertical pins for vertical contact testing, NanoX minimizes device damage and contamination while enabling fast measurements through shortened stabilization time.


NanoX’s ultra-precision NEMS process enables exceptional pin-to-pin height uniformity and alignment tolerance beyond conventional technologies, allowing precise inspection of ultra-small chips.

Probe Station


Probe Station


Ultra-Fine Device Electrical Inspection Technology

Probe Station

Probe Station


Ultra-Fine Device Electrical Inspection Technology

MicroLED Probe Station

NanoX has developed not only probe cards but also dedicated probe stations with high precision and measurement speed for ultra-fine devices, enabling comprehensive support for all demand across probe card and station products.

Precision and High-Speed Measurement

Precision

< ±1µm

Measurement Speed ¹

1,600dies/s

NanoX’s extensive expertise in automated equipment manufacturing enables measurement precision within 1 μm, supporting the ongoing miniaturization of ultra-fine devices and pads.

With multi-contact capability of over 512 channels, NanoX’s probe station achieves more than 3,200 measurements per second while maintaining precision, delivering industry-leading measurement speed beyond conventional MicroLED inspection systems.

1) Measurements based on a 512-channel MicroLED probe card

Verified Reliability 

Probe Mark Evaluation

Within an overdrive range of 10–20 μm, the size and position of probe needle contact marks remain within a stable range.

Post-Repetition LED Impact Assessment

After 1,000 repeated measurements on the same device, the Vf1 value remains at approximately 1.900 V, demonstrating no performance degradation.

Probe Card Lifetime Evaluation

Even after one million measurements, the probe card voltage deviation remains within 0.05 V, and pin wear remains within the measurement error range.

iEPt™

With the world’s first application of 

3D NEMS technology, 

NanoX sets the standard for the probe market.

iEPt™ (individual Elastic Probe technology), independently developed by NanoX, enables ultra-fine pitch implementation, 

making Electro Luminescence (EL) testing of MicroLED and semiconductor devices possible.

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iEPt™

With the world’s first application of 

3D NEMS technology, 

NanoX sets the standard for the probe market.



iEPt™ (individual Elastic Probe technology), independently developed by NanoX, enables ultra-fine pitch implementation, 

making Electro Luminescence (EL) testing of MicroLED and semiconductor devices possible.

NANO-X 190, Saneop-ro, Gwonseon-gu, Suwon-si, Gyeonggi-do, Republic of Korea

031-278-6473 / nanoex@nanoex.co.kr

Copyright 2024. All Right Reserved.

NANO-X 190, Saneop-ro, Gwonseon-gu, Suwon-si, Gyeonggi-do, Republic of Korea

031-278-6473 / nanoex@nanoex.co.kr

Copyright 2024. All Right Reserved.